Electron Probe Microanalysis (EPMA)
Electron Probe Microanalysis (EPMA) is an analytical technique used to determine the elemental composition of a solid sample at the micrometer scale. EPMA is based on the principles of Xray emission spectroscopy, and it combines the imaging capabilities of an electron microscope with the quantitative elemental analysis capabilities of an X-ray spectrometer. The technique is widely employed in various fields, such as materials science, geology, metallurgy, and semiconductor research, for studying both the composition and microstructure of materials.