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The Gatan Precision Etching and Coating System II utilizes two (2) penning ion guns to etch and to coat an SEM sample in one evacuation. Ion etching the surface of a sample is done in cases when traditional grinding and polishing may not be sufficient or may adversely cause undesired reactions due to a specific sample’s chemistry. For metallography, ion etching is a viable and inert alternative to wet chemical etching, which is done to reveal grain microstructure.
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https://www.hbku.edu.qa/sites/default/files/sem_sample_preparation_0.pdf
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